JPS632087B2 - - Google Patents

Info

Publication number
JPS632087B2
JPS632087B2 JP57193067A JP19306782A JPS632087B2 JP S632087 B2 JPS632087 B2 JP S632087B2 JP 57193067 A JP57193067 A JP 57193067A JP 19306782 A JP19306782 A JP 19306782A JP S632087 B2 JPS632087 B2 JP S632087B2
Authority
JP
Japan
Prior art keywords
light
optical axis
catadioptric
optical system
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57193067A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5983116A (ja
Inventor
Kaneyasu Ookawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP19306782A priority Critical patent/JPS5983116A/ja
Publication of JPS5983116A publication Critical patent/JPS5983116A/ja
Publication of JPS632087B2 publication Critical patent/JPS632087B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP19306782A 1982-11-02 1982-11-02 光学系の調整装置 Granted JPS5983116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19306782A JPS5983116A (ja) 1982-11-02 1982-11-02 光学系の調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19306782A JPS5983116A (ja) 1982-11-02 1982-11-02 光学系の調整装置

Publications (2)

Publication Number Publication Date
JPS5983116A JPS5983116A (ja) 1984-05-14
JPS632087B2 true JPS632087B2 (en]) 1988-01-16

Family

ID=16301649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19306782A Granted JPS5983116A (ja) 1982-11-02 1982-11-02 光学系の調整装置

Country Status (1)

Country Link
JP (1) JPS5983116A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0512753Y2 (en]) * 1986-09-30 1993-04-02
CN104296654B (zh) * 2014-09-26 2017-06-09 中国科学院光电研究院 激光跟踪仪位置探测器零位安装误差的检测装置和方法
CN117073586B (zh) * 2023-10-17 2024-01-09 青岛迈朗格智能制造有限公司 一种同轴双轴转台机械轴平行度检测装置及方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522623B2 (en]) * 1972-02-08 1977-01-22
JPS567246A (en) * 1979-06-25 1981-01-24 Olympus Optical Co Ltd Method and unit for focus detection

Also Published As

Publication number Publication date
JPS5983116A (ja) 1984-05-14

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